Allowing for matrix effects in local electron-probe analysis using a new model of the distribution function for the depth of characteristic X-ray radiation

Abstract

The results from using a new distribution function for the depth of characteristic X-ray radiation φ(ρz) to calculate the allowance for absorption f(χ) in quantitative electron-probe microanalysis are presented. The integral φ(ρz) over ρz in the region of generation is proportional to the normalized absorbed energy value of the electron beam in a sample. This is used to calculate the backscattering factor R.