All-inkjet-printed dissolved oxygen sensors on flexible plastic substrates

Abstract

Inkjet printing is a promising alternative manufacturing method to conventional standard microfabrication techniques for the development of flexible and low-cost devices. Although the use of inkjet printing for the deposition of selected materials for the development of sensor devices has been reported many times in literature, it is still a challenge and a potential route towards commercialization to completely manufacture sensor devices with inkjet technology. In this work is demonstrated the fabrication of a functional low-cost dissolved oxygen (DO) amperometric sensor with feature sizes in the micrometer range using inkjet printing. All the required technological steps for the fabrication of a complete electrochemical three electrodes system are discussed in detail. The working and counter electrodes have been printed using a gold nanoparticle ink, whereas a silver nanoparticle ink was used to print a pseudo-reference electrode. Both inks are commercially available and can be sintered at low temperatures, starting already at 120 °C, which allows the use of plastic substrates. In addition, a printable SU8 ink formulation cured by UV is applied as passivation layer in the sensor device. Finally, as the performance of analytical methods strongly depends on the working electrode material, is demonstrated the electrochemical feasibility of this printed DO sensor, which shows a linear response in the range between 0 and 8 mg L−1 of DO, and affords a detection limit of 0.11 mg L−1, and a sensitivity of 0.03 μA L mg−1. The use of flexible plastic substrates and biocompatible inks, and the rapid prototyping and low-cost of the fabricated sensors, makes that the proposed manufacturing approach opens new opportunities in the field of biological and medical sensor applications.