All-transparent graphene-based flexible pressure sensor array

Abstract

In this work, we propose and demonstrate a flexible capacitive tactile sensor array based on graphene served as electrodes. The sensor array consists of 3 × 3 units with 3 mm spatial resolution, similar to that of human skin. Each unit has three layers. The middle layer with microstructured PDMS served as an insulator is sandwiched by two perpendicular graphene-based electrodes. The size of each unit is 3 mm × 3 mm and the initial capacitance is about 0.2 pF. High sensitivities of 0.73 kPa[Formula: see text] between 0 and 1.2 kPa and 0.26 kPa[Formula: see text] between 1.2 and 2.5 kPa were achieved on the fabricated graphene pressure sensors. The proposed flexible pressure sensor array shows a great potential on the application of electric skin or 3D touch control.