Abstract
An all-sapphire fiber-optic extrinsic Fabry-Perot interferometric (EFPI) sensor for the simultaneous measurement of ultra-high temperature and high pressure is proposed and experimentally demonstrated. The sensor is fabricated based on all-sapphire, including a sapphire fiber, a sapphire capillary and a sapphire wafer. A femtosecond (fs) laser is employed to drill a through hole at the side wall of the sapphire capillary to allow gas flow. The sapphire fiber is inserted from one side of the sapphire capillary. The sapphire wafer is fixed at the other side of the sapphire capillary. The first Fabry-Perot (FP) cavity, composed of the end face of the sapphire fiber and the front surface of the sapphire wafer, is used for measuring pressure, while the second FP cavity, composed of the two surfaces of the sapphire wafer, is used for measuring temperature. Experimental results show that the sensor can simultaneously measure ultra-high temperature and gas pressure within the temperature range of 20 - 1400 °C and the pressure range of 0 - 5 MPa. The temperature sensitivity is 0.0033 µm/°C, and the pressure sensitivity decreases as the temperature increases, reaching 1.8016 µm/MPa and 0.3253 µm/MPa at temperatures of 20 °C and 1400 °C, respectively.
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