Abstract

The straight channel optical waveguide coated with the SnO2 nanoparticle is studied as an all-optical humidity sensor. The proposed sensor shows that the transmission loss of the waveguide increases with increasing relative humidity (RH) from 56% to 90% with very good repeatability. The sensitivity to changes in relative humidity is ∼2 dB/% RH. The response time of the humidity sensor is 2.5 s, and the recovery time is 3.5 s. The response to humidity can be divided into 3 different regions, which are correlated to the degree of water adsorption in the SnO2 nanoparticle layer. Compared with the previous all-optical humidity sensor based on SnO2, the proposed sensor exhibits more rapid response, simpler fabrication process, and higher sensitivity. The proposed sensor has a potential application in the long distance, remote agriculture, and biological humidity sensing.

Highlights

  • Aside from temperature, relative humidity (RH) is one of the most frequently measured physical qualities in advance applications such as material processing and manufacturing [1, 2]

  • The range of relative humidity measured by the planar slab optical waveguide based sensor (3% RH − 98% RH) is broader than the values reported by the optical fiber based sensors (20% RH − 90% RH)

  • We report an all-optical humidity sensor in the form of the SnO2 nanoparticle layer coated on a planar stripe optical waveguide

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Summary

Introduction

Aside from temperature, relative humidity (RH) is one of the most frequently measured physical qualities in advance applications such as material processing and manufacturing [1, 2]. A number of humidity sensors with response time of less than 1 s have been developed These sensors can be categorized into electrical, acoustic, and optical systems. Besides exhibiting the fastest response time, all-optical humidity sensors have advantages such as immunity to electromagnetic interference and nuclear radiation (for high-energy physics application), water and corrosion resistance, and ability to operate in low temperature environment. The range of relative humidity measured by the planar slab optical waveguide based sensor (3% RH − 98% RH) is broader than the values reported by the optical fiber based sensors (20% RH − 90% RH). All optical humidity sensors based on the SnO2 nanoparticles have a potential for being used in high-energy physics applications and long-distance humidity sensing that require the fast response time

Device fabrication and experiment
Characterizations of SnO2 nanoparticles
Humidity sensing test
Comparison with another all-optical humidity sensor
Conclusions
Full Text
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