Abstract
This paper proposes an electrostatic-piezoelectric-electromagnetic hybrid vibrational power generator with different frequency broadening schemes. Both the nonlinear frequency broadening mechanisms and the synergized effect of the electrostatic-piezoelectric-electromagnetic hybrid structures are investigated. The structure and performance of the composite generator are optimized to improve the response bandwidth and performance. We propose that the electrostatic power generation module and the electromagnetic power generation module be introduced into the cantilever beam to make the multifunctional cantilever beam, realizing small integrated output loss, high output voltage, and high current characteristics. When the external load of the electrostatic power generation module is 10 kΩ, its peak power can reach 3.6 mW; when the external load of the piezoelectric power generation module is 2 kΩ, its peak power is 2.2 mW; and when the external load of the electromagnetic power generation module is 170 Ω, its peak power is 0.735 mW. This means that under the same space utilization, the performance is improved by 90%. Moreover, an energy management circuit (ECM) at the rear end of the device is added, through the energy conditioning circuit, the device can directly export a 3.3 V DC voltage to supply power to most of the sensing equipment. In this paper, the hybrid generator’s structure and performance are optimized, and the response bandwidth and performance are improved. In general, the primary advantages of the device in this paper are its larger bandwidth and enhanced performance.
Highlights
Over the past few decades, tremendous advances have been made in microelectronic systems, with devices becoming smaller and requiring less energy [1]
We propose the electrostatic power generation module and the electromagnetic power generation module be Conception introduced into cantilever beam to make the multifunctional cantilever beam, The ofthe
The mass block enhance the electrical performance, the piezoelectric power generation module adopts the is attached to the free end of the cantilever beam, further improving the output perbonding and thinning technology based on the intermediate layer to fabricate the film with formance
Summary
Over the past few decades, tremendous advances have been made in microelectronic systems, with devices becoming smaller and requiring less energy [1]. Micromachines 2021, 12, 1083 static mechanism, Naruse et al [28] present a low-frequency electrostatic micro-vibrational energy harvester (VEH) supported by microspheres. The nonlinear counterpart enhances the bandwidth almost six times to 25 Hz at the cost of reduced power density In these studies, the voltage performance of the small-size electromagnetic energy generator in the low-frequency environment is not very prominent, but the current generated using the electromagnetic energy harvesting method is large. The electrostatic [43,44,45,46,47,48] generator be introduced the cantilevermodule beam to the multifunctional cantilever module andinto the electromagnetic aremake integrated with the piezoelectric generatorbeam, r izingmodule small to integrated output high output voltage, and high currentthat characteristi improve the outputloss, power of the nonlinear generator.
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