Abstract

Two-dimensional (2D) semiconductors, such as transition metal dichalcogenides (TMDs) and black phosphorus, are the most promising channel materials for future electronics because of their unique electrical properties. Even though a number of 2D-materials-based logic devices have been demonstrated to date, most of them are a combination of more than two unit devices. If logic devices can be realized in a single channel, it would be advantageous for higher integration and functionality. In this study we report high-performance van der Waals heterostructure (vdW) ReS2 transistors with graphene electrodes on atomically flat hBN, and demonstrate a NAND gate comprising a single ReS2 transistor with split gates. Highly sensitive electrostatic doping of ReS2 enables fabrication of gate-tunable NAND logic gates, which cannot be achieved in bulk semiconductor materials because of the absence of gate tunability. The vdW heterostructure NAND gate comprising a single transistor paves a novel way to realize “all-2D” circuitry for flexible and transparent electronic applications.

Highlights

  • Ultrathin two-dimensional (2D) semiconducting materials are useful for a number of electronic applications because of their unique properties originating from their atomically thin nature[1,2,3,4,5]

  • The ReS2 channel was placed on the hexagonal boron nitride (hBN) to reduce scattering from charged impurities of the substrate and interfacial impurities

  • The high field effect mobility of 35 cm2/V·s and high on-off ratio of 106 were obtained by suppression of Fermi level pinning at the graphene-ReS2 junction and reduction of charged impurity scattering

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Summary

Introduction

Ultrathin two-dimensional (2D) semiconducting materials are useful for a number of electronic applications because of their unique properties originating from their atomically thin nature[1,2,3,4,5]. It has been anticipated that a scale-down limit can be overcome by 2D semiconductors for higher integration of electronic devices. In this regard, “all-2D” devices comprising only 2D materials, i.e., van der Waals heterostructure (vdW) devices, have been demonstrated[8,9,10,11]. Significant contact resistance between deposited metal and 2D semiconducting channels severely deteriorates device performance due to the Fermi level pinning at the interface[20], which makes it difficult to utilize the 2D semiconductors for practical applications required by the industry. By locally tuning the Fermi level of a 2D channel, a multi-functional logic device can be realized in one 2D channel

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