Alkoxide-derived amorphous ZrO 2 coatings

Abstract

Pure and transparent ZrO 2 coatings on microscopic glass slides, ranging in thickness from 250 to about 1500 Å, were prepared from (i) zirconium n-propoxide in dry cyclohexane, and (ii) zirconium n-propoxide in isopropanol with additions of acetic acid and water. A dipping technique was used. A baking temperature of 450°C was chosen for the conversion of as-prepared gel films into the pure oxide state. The coatings were X-ray amorphous. The dependence of coating thickness on lifting speed and concentration of zirconium n-propoxide in solution was examined. The coating profile showed that these films were fairly smooth beyond a “trouble zone” (appearing along the boundary between the coated and non-coated parts of a slide and extending up to about 1 mm) where a relatively high and irregular profile was observed.