Abstract
The high-vacuum self-pumping MEMS cell for atomic spectroscopy presented here is the result of the technological achievements of the author and the research group in which he works. A high-temperature anodic bonding process in vacuum or buffer gas atmosphere and the influence of the process on the inner gas composition inside a MEMS structure were studied. A laser-induced alkali vapor introduction method from solid-state pill-like dispenser is presented as well. The technologies mentioned above are groundbreaking achievements that have allowed the building of the first European miniature atomic clock, and they are the basis for other solutions, including high-vacuum optical MEMS. Following description of the key technologies, high-vacuum self-pumping MEMS cell construction and preliminary measurement results are reported. This unique solution makes it possible to achieve a 10−6 Torr vacuum level inside the cell in the presence of saturated rubidium vapor, paving the way to building a new class of optical reference cells for atomic spectroscopy. Because the level of vacuum is high enough, experiments with cold atoms are potentially feasible.
Highlights
The need to develop miniaturized, low power consumption and low-cost instruments/sensors is a current trend
The Coherent Population Trapping effect (CPT) effect is similar to Electromagnetically Induced Transparency (EIT) [2], with the difference being that microwave interactions with atoms have been replaced by optical interactions
The purpose of this paper is to present important achievements in MEMS vapor cells and high-vacuum MEMS technology toward the development of self-pumping MEMS cells for atomic spectroscopy
Summary
The need to develop miniaturized, low power consumption and low-cost instruments/sensors is a current trend. To become competitive solutions for crystal-based time references (TCXO, OCXO), atomic standards must comply with a frequency stability of about × 10−11 τ, low power consumption of ~100 mW, size of a few cubic centimeters (~10–30 cm3), and be mass producible to give a low price This is possible through miniaturization and integration using microengineering technology. The author’s activity in this field started in 2006 During this period, key technologies of miniature, silicon-glass optical MEMS cells, like non-standard anodic bonding sealing processes in buffer gas atmospheres, as well as the novel cesium vapor introduction during laser-induced dispensing from a solid-state dispenser, have been invented [13,14,15] and successfully implemented under the MAC-TFC FP7 Project [16], which has resulted in the first European CSAC. The experience and knowledge gained so far in tandem with the recently developed MEMS ion-sorption pump [17,18] makes it possible to think that achieving the critical condition of high vacuum inside the cell for the development of MEMS optical cell for cold atom spectroscopy is possible
Sign-in/Register to view highlights & summary Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
