Abstract
In this paper, a direct pre-bonding technology after alignment of the chip is presented to avoid the post-misalignment problem caused by the transferring process from an alignment platform to a heating oven. An alignment system with a high integration level including a microscope device, a vacuum device, and an alignment device is investigated. To align the chip, a method of ‘fixing a chip with microchannels and moving a chip with nanochannels’ is adopted based on the alignment system. With the alignment system and the assembly method, the micro/nanofluidic chip was manufactured with little time and low cost. Furthermore, to verify the performance of the chip and then confirm the practicability of the device, an ion enrichment experiment is carried out. The results demonstrate that the concentration of fluorescein isothiocyanate (FITC) reaches an enrichment value of around 5 μM and the highest enrichment factor is about 500-fold. Compared with other devices, an alignment system presented in this paper has the advantages of direct pre-bonding and high integration level.
Highlights
A microfluidic technology [1] called lab-on-a-chip with the main feature of operating fluid on a micron scale can achieve the function of a chemistry and biology lab in several square centimeters [2,3,4,5]
To improve the property of the microfluidic technology, the nanostructure is embedded into the chip with microchannels forming a micro/nanofluidic chip suitable for single molecule detection, separation analysis, and protein enrichment due to the size of the nanochannels, which can accommodate biological macromolecules such as DNA and proteins
An alignment system for a micro/nanofluidic chip is composed of a microscope device, a vacuum device, and an alignment device
Summary
A microfluidic technology [1] called lab-on-a-chip with the main feature of operating fluid on a micron scale can achieve the function of a chemistry and biology lab in several square centimeters [2,3,4,5]. A multichip alignment device presented by Chen et al [16] implemented multiple alignment bonding at the same time on the basis of a centrifugalization alignment technology, whereas the chips must be fixed stack and transferred to the bonding chamber for the bonding Up to this point, no literature about an alignment system with the advantages of direct pre-bonding and high integration level has been reported. An alignment system with a pre-bonding device for fabricating a micro/nanofluidic chip is demonstrated and an assembly method referred to ‘fixing a chip with microchannels and moving a chip with nanochannels’ is adopted. Based on this system, a micro/nanofluidic chip is manufactured and an ion enrichment experiment is developed and the experiment results are analyzed. The performance of the alignment system compared with other devices is discussed
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