Abstract
The alignment of components in complex multibeam arrangements is typically prone to errors that limit the performance of the system. A systematic procedure for aligning such systems is presented here. The method facilitates the precision alignment of the optical elements to achieve the accurate projection of multiple on- and off-axis images and the simultaneous interference of the multiple beams. In addition to the multibeam imaging/interference system presented, the procedure can be employed in other multibeam imaging and/or interfering configurations.
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