Abstract
Layer thickness estimation method using the average energy shift of electrons passing through the layer is presented. The traditional approach of analyzing the signal electron is extended by using the spectral distribution of the energy shift of the electrons. In this approach, the tendency of the multiple inelastic scattering spectra to increase the average energy shift, depending on the number of inelastic interactions, is utilized to estimate the thickness of a layer. An algorithm that uses this spectral energy shift to evaluate the layer thickness was developed and validated against calculated spectrum from a known materials and thicknesses. The thickness evaluation by this algorithm is in a good agreement with the known thickness.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
