Al2O3 nanostructured gas sensitive material for silicon based low power thermocatalytic sensor

Abstract

Micro-catalytic gas sensors are essential devices for detection of combustive gases up to lower explosion limit (LEL). Micro-catalytic gas sensors capable to detect hydrocarbons below 50 mW power consumption at 550 °C operation temperature were developed by using a novel gas sensing material technique. Experiments were aiming at deposition of controlled volume and structure of the catalyst. Constant current method in a Wheatstone-bridge configuration was applied in functional tests of developed Al2O3 catalysts.