Abstract
We have deposited an Al doped ZnO (AZO) film at room temperature by RF magnetron sputtering with homemade targets. We investigated the dependences of the optical and the electrical properties of the sputtered AZO films on the dopant contents in the targets. The AZO films should a preferred orientation in the [001] direction. As the amounts of the dopants were changed, the crystalline and the transmittance changed. The electrical resistivity also changed with changing aluminum doping amounts. The AZO films were used as anode electrodes for organic light-emittingdiode (OLED) devices.
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