Abstract
Humidity sensors are commonly based on the resistance change of metal oxide semiconductors, which show high sensitivity in low humidity but low sensitivity in high humidity. In this work, we design a novel humidity sensor based on the airflow-induced triboelectric nanogenerator (ATNG) that can serve as a self-powered sensor to detect humidity (especially in high humidity) and airflow rate. The output current or voltage change is investigated under different humidity (20-100% relative humidity) at fixed airflow rate and different airflow rates (15-25 L/min) at a fixed humidity. The working principle of the ATNG-based sensor is illustrated. We find that both output current and voltage can serve as a variable for detecting humidity, while only the output current can serve as a variable for determining airflow rate. Our study demonstrates an innovative approach toward detection of humidity and airflow rate with advantages of self-power, multifunction, low cost, simple fabrication, and high sensitivity.
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