Airflow energy harvesters of metal-based PZT thin films by self-excited vibration

Abstract

We developed self-excited vibration energy harvesters of Pb(Zr,Ti)O3 (PZT) thin films using airflow. To enhance the self-excited vibration, we used 30-μm-thick stainless steel (SS304) foils as base cantilevers on which PZT thin films were deposited by rf-magnetron sputtering. To compensate for the initial bending of PZT/SS304 unimorph cantilever due to the thermal stress, we deposited counter PZT thin films on the back of the SS304 cantilever. We evaluated power-generation performance and vibration mode of the energy harvester in the airflow. When the angle of attack (AOA) was 20° to 30°, large vibration was generated at wind speeds over 8 m/s. By FFT analysis, we confirmed that stable self-excited vibration was generated. At the AOA of 30°, the output power reached 19 μW at wind speeds of 12 m/s.