Abstract
In this letter, we propose an air-gap stacked spiral inductor using air-bridge technology. By stacking metal lines, inductor area can be reduced by 25%-5% compared with conventional spiral inductors. The air-gap structure yields low parasitic capacitance, so that the resonance frequency is higher than that of conventional inductor in spite of the reduced interwire distance.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have