Afm Study of Surface Morphology of High Dose Co Implanted Si with A Mevva Ion Source

Abstract

AbstractThe surface morphology of high dose Co implanted Si has been studied by atomic force microscopy. The Co implantation was performed using a metal vapor vacuum arc (MEVVA) ion source at an extraction voltage of 60 or 70 kV to a dose of 2×l017 or 4×l017 ions cm-2 at substrate temperatures Ts ranging from 210°C to 700°C. When Ts is less than about 600°C, the surface morphology of the implanted samples shows largely similar features of densely distributed narrow asperities. However, for the sample with Ts of 700°C, the surface morphology is significantly different and shows hillocks of much larger size. It is also found that when other parameters are fixed, for Ts less than about 600°C, the root-mean-square roughness Rrms increases exponentially with 7^, from the subnanometer scale to several nanometers. But for the sample with Ts of 700°C, there is an abrupt increase in Rrms to 35 nm. The variation of the surface morphology with other parameters is also discussed.