Abstract

In order to examine the effect of oxygen on AES and XPS spectra of zirconium, we have made AES and XPS studies of oxygen stabilized alpha zirconium (α-Zr(O)) with various oxygen contents. Both AES and XPS spectra of α-Z(O) are varied continuously with increasing oxygen content up to 25 at% and no evidence for the surface precipitation of the oxide or the surface depletion of oxygen is observed. The surface oxygen concentration of the α-Zr(O) determined by AES peak intensities shows a quite good agreement with the bulk oxygen concentration even after a prolonged Ar ion bombardment, whereas the depletion of oxygen is seen in ZrO 2 . In XPS spectra, the conduction band of α-Zr(O) remains for oxygen content up to 25 at%, while peak broadenings of Zr 4p and O 2p become notable above 15at% O. Such an electronic structure change should be taken into account for the investigation of the different behavior under Ar ion bombardment between α-Zr(O) and ZrO 2 .

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