Aerosol Jet Printer as an Alternative to Wire Bond and TSV Technology for 3D Interconnect Applications

Abstract

Optomec's Aerosol Jet print platform provides an evolutionary alternative to both wire bond and TSV technology, providing high density 3-dimensional interconnect capabilities which enable multi-functional integrated circuits to be stacked and vertically interconnected in high performance System-in-Package (SiP) solutions. The die stacks can include 8 or more die, with a total stack height of ~ 1 mm. The printing system has a working distance of several mm which means that no Z-height adjustments are required for the interconnect printing. Closely coupled pneumatic atomizers with multiplexed print nozzles are used to achieve production throughput of greater than 15,000 interconnects per hour. The Aerosol Jet deposits silver nanoparticle ink connections on staggered multi-chip die stacks. High aspect ratio interconnects with <30-micron line width and 6-micron line heights have been demonstrated at sub 60-micron pitches with resistivity <1x10−7 ohm*m. Pre-production yields exceeding 80% have been consistently realized. This paper will be further expanded to include pre-production qualification results, final production packaging, and further definition of the Aerosol Jet print platform integrated within a high throughput, manufacturing ready automation solution.