Abstract
The “Manchester Connection” with analytical electron microscopy (AEM) goes back to 1913 and the work of Moseley which was carried out in the Physics Department of the University of Manchester. It was Moseley who first pointed out that there is a simple relationship between Z, the atomic number of an element, and Ek,the energy of the characteristic K-shell X-ray. This relationship is enshrined in Moseley's Law, Ek = 10.3(Z-1).The origin of the modern bulk microprobe analyzer lies in the Ph.D. project of Castaing. Under the supervision of Guinier, Castaing combined an electron microscope and an X-ray spectrometer and obtained a current of a few nA in an electron beam under a micron in diameter. Although enormous advances were made in instrumentation and quantification in the 1950's and 1960's, the spatial resolution for microprobe analysis remained at about 1 μm3 or a mass of about 10-12g, no matter how small the diameter of the incident electron beam. This limitation arises from the physics of the interaction of a high energy electron beam with a solid sample.
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