Abstract
A single field condenser objective permits the imaging of a diaphragm onto the specimen such that areas with diameters smaller than 1000 Å can be illuminated. Combined with an electronic deflection system, this feature is particularly advantageous for radiation-sensitive specimens which should be exposed for the minimum dose required by the recorder.This method is preferable to others which, for example, require mechanical movement of the stage. In addition it can be directly combined with electronic image recording systems [1].A two-stage deflection system fabricated by printed circuit techniques [2] can be readily fitted into the upper part of the objective. The printed pattern is such that the current produces an almost homogeneous deflecting field. A second one-stage deflecting system in the intermediate lens system provides automatic retracking of the image such that by suitable control only the image with respect to the detector is moved, and not the illuminated region
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More From: Proceedings, annual meeting, Electron Microscopy Society of America
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