Abstract
This paper presents an overview of the research progress on Multiphysics simulation of MEMS electrostatic actuators. MEMS electrostatic actuators have shown significant development potential in applications such as ADWSS and VOA. However, the increasing size and complexity of these devices have posed challenges to traditional Multiphysics simulation methods, leading to lengthy computational times that hinder the overall device development process. In order to enhance simulation efficiency and meet the demands of device development, the use of simplified single physics field models have been explored. The results have demonstrated that the simplified single physics filed simulation model yields comparable results to traditional Multiphysics simulations with an error tolerance of within 10%, while reducing simulation time by 80-90%.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.