Abstract
We are developing small-pixel transition-edge sensor microcalorimeters for solar physics and astrophysics applications. These large format close-packed arrays are fabricated on solid silicon substrates and are designed to have high energy resolution, and also accommodate count-rates of up to a few hundred counts per second per pixel for X-ray photon energies up to <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$\sim$</tex></formula> 8 keV. We have fabricated kilo-pixel versions that utilize narrow-line planar and stripline wiring. These arrays have a low superconducting transition temperature, which results in a low heat capacity and low thermal conductance to the heat sink. We present measurements of the performance of pixels with single 65- <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$\mu \hbox{m}$ </tex></formula> absorbers on a 75- <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$\mu \hbox{m}$</tex></formula> pitch. With individual single pixels of this type, we have achieved a full-width at half-maximum energy resolution of 0.9 eV with 1.5 keV Al K X-rays, to our knowledge the first X-ray microcalorimeter with sub-eV energy resolution. We will discuss the properties of these arrays and their application to new solar and astrophysics mission concepts.
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