Abstract
Magnetic Micro Electro-mechanical Systems (Magnetic MEMS) provide transducer capabilities ranging from thin-film storage devices and micro sensors to micro actuator solutions. This paper provides an overview over magnetic thin-film devices developed at the Institute for Microtechnology at the Leibniz Universitaet Hannover`s Center for Production Technology (PZH) in Garbsen, Germany. In the area of data storage, it presents a microcoil for optical data storage. In the field of micro sensors it shows two inductive length measurement systems, an eddy current proximity sensor and a micro strain gauge for force measurements. Micro actuators built as linear positioners and as tilting platforms, as well as a new actuator principle based on the magnetic shape memory (MSM) effect conclude the paper.
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