Abstract
We report on ultraviolet (UV) InGaN and GaN multiple quantum well (MQW) laser diodes grown on c-plane sapphire substrates by metal organic chemical vapor deposition. By reducing the indium content in the InGaN/InAlGaN MQW, we have systematically pushed the room-temperature laser emission to a record low wavelength of 363.2nm. Pulsed threshold current densities around 5 kA/cm 2 have been achieved for laser diodes with emission wavelength between 368 nm and 378 nm. Light output powers greater than 400mW under pulsed current-injection conditions (pulse duration 500 ns, repetition frequency 1 kHz) and differential quantum efficiencies of 4.8% have been achieved. We also demonstrate room-temperature continuous-wave operation of ridge-waveguide devices with threshold currents of 85 mA for an emission wavelength of 377.8 nm and output power of more than 3 mW.
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