Abstract
From achievements in display imaging to air bag deployment, microelectromechanical systems are becoming more commonplace in everyday life. With an abundance of opportunities for innovative R&D in the field, the research trends are not only directed toward novel sensor and actuator development, but also toward further miniaturization, specifically achieving micro- and nanoscaled integrated systems. R&D efforts in space, military, and commercial applications are directing specific research programs focused on the area of materials science as an enabling technology to be exploited by researchers and to further push the envelope of micrometerscaled device technology. These endeavors are making significant progress in bringing this aspect of the microelectro-mechanical field to maturation through advances in materials and processing technologies.
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