Abstract
Among the currently available electron microscopy techniques, scanning electron microscopy (SEM) techniques are quite unique because they are capable for examining various specimens at nanoscale, even under environmental conditions (such as elevated pressure/temperature). SEM has a relatively high resolution, in the most up-to-date generation SEM instrument with field-emission-gun (FEG), a spatial resolution of sub-nanometer can now be achieved. Recently, several advanced SEM techniques have been developed to extend the applications, such as scanning transmission electron microscopy, cathodoluminescence, three-dimensional reconstruction, environmental SEM, and scanning ultrafast electron microscopy. In this article, we make a general introduction of the recent developments of microscopy and microanalysis techniques in SEM, along with their applications in nanosciences.
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