Abstract
Recent advanced ion beam processing projects in Japan are reviewed. In this review, R&D projects of ion beam technology and processing technology by AMMTRA (Advanced Material-processing and Machining Technology Research Association), the establishment of an ion beam center corporation by NEDO (New Energy and Industrial Technology Development Organization) and other organizations, and some of the research on priority areas from the Ministry of Education will be reviewed. The projects include R&D of ion beam equipments in a wide range of applications, new ion beam process technologies, and specific applications.
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