Abstract

This research explores the capacitive humidity sensing properties of CuO ceramic, selected for its simplicity as an oxide and ease of fabrication, in addition to its remarkable dielectric properties. The CuO sample was fabricated by sintering at 980 °C for 5 h. A microstructure with a relative density of 88.9% was obtained. X-ray diffraction confirmed the formation of a pure CuO phase. Broadband dielectric spectroscopy revealed that the observed giant dielectric properties at room temperature (RT) were attributed to extrinsic effects, including the internal barrier layer capacitor and sample-electrode contact effects. A key focus of this study was to examine the giant dielectric properties of CuO ceramic as a function of relative humidity (RH) at RT and frequencies of 102 and 103 Hz. It was observed that the capacitance of CuO continuously increased with rising RH levels, ranging from 30 to 95%. Notably, the maximum hysteresis errors were constrained to 2.3 and 3.3% at 102 and 103 Hz, respectively. Additionally, the CuO ceramic demonstrated very fast response and recovery times, approximately 2.8 and 0.95 min, respectively. The repeatability of the humidity response of the capacitance was also established. Overall, this research highlights the high potential of CuO as a giant dielectric material for application in humidity sensors.

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