Abstract

In this article we present our latest work on the optimization of mid-infrared quantum cascade laser fabrication techniques. Our efforts are focused on low dissipation devices, broad-area high-power photonic crystal lasers, as well as multi-wavelength devices realized either as arrays or multi-section distributed feedback (DFB) devices. We summarize our latest achievements and update them with our most recent results.

Highlights

  • Since the first demonstration [1] of the quantum cascade laser (QCL) over two decades ago, the surrounding technology has vastly improved, as proven by room temperature continuous wave (CW) operation [2], high optical power [3], low dissipation devices [4,5,6], and extended accessible spectral range [7,8,9,10,11]

  • Chemical information can be obtained by atom probe tomography (APT) measurements, which can deliver the three-dimensional distribution of chemical species (Figure 1d)

  • QCLs are interesting for spectroscopic applications, into a waveguide structure, which is responsible for efficient current driving in the structure and the the desirable performance attributes are precise mode control, low powerfor dissipation, and high slope build-up of the optical modes

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Summary

Introduction

Since the first demonstration [1] of the quantum cascade laser (QCL) over two decades ago, the surrounding technology has vastly improved, as proven by room temperature continuous wave (CW) operation [2], high optical power [3], low dissipation devices [4,5,6], and extended accessible spectral range [7,8,9,10,11] These achievements can unambiguously be attributed to the extensive work on fabrication and design strategies with the aim to optimize thermal transport in the structures, to reduce the electrical footprint of the active waveguide, to decrease electrical and scattering losses due to an improved material quality, while simultaneously amplifying the power [12,13,14,15,16,17], as well as to continued optimization of the quantum cascade structure serving as the gain medium in QCLs [18,19,20,21,22].

Active Region Growth and Material Characterization
Method
Waveguide Fabrication
Grating lithography a quarter two-inch
Analysis
Epitaxial
Optimized DFB-QCL Performance
Summary of results forforshort-wavelength
QCL Arrays
Surface
Substrate
Multi-Wavelength
Photonic
10. Buried photonic
Conclusions
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