Abstract

A bionic fish cilia median low frequency three dimensional MEMS vector hydrophone is reported in this paper The piezo resistive reasonable position was obtained through finite element analysis by ANSYS and the structure was formed by MEMS processes including lithography ion implantation PECVD and etching etc The standing wave barrel results show that the lowest sensitivity of the hydrophone is dB and reach up to dB in which the voltage amplification factor is It has a good frequency response characteristics in Hz Hz band Directivity tests displayed that the hydrophone has a good shaped directivity in which the resolution is not less than dB and asymmetry of the maximum axial sensitivity value is less than dB and this hydrophone has a good directional pattern in form of shapes The experiment results show that the receiving sensitivity of the hydrophone is dB dB V mPa The novel hydrophone not only possesses satisfactory directional pattern as well as miniature structure but also has good low frequency characteristics and satisfies the requirements for low frequency acoustic measurement

Highlights

  • Engineers, designers and architects often look to nature for inspiration

  • Mimicking its creations is a sure way of producing new technologies and new achievement that are both efficient and reliable which leads to development of a threedimensional MEMS vector hydrophone based on fish cilia and piezo resistive principle

  • A kind of MEMS vector hydrophone is fabricated by our research group

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Summary

Introduction

Designers and architects often look to nature for inspiration. Biology has perfected its designs and formed many fruitful abilities such as its exquisite sensitivity, effectiveness, and reliability, through billions of years of evolution. Mimicking its creations is a sure way of producing new technologies and new achievement that are both efficient and reliable which leads to development of a threedimensional MEMS vector hydrophone based on fish cilia and piezo resistive principle. The vector hydrophone with low-frequency detection, miniaturization, and high sensitivity is rarely reported in open published literatures. A novel MEMS vector hydrophone based on the theory of bionics and piezo resistive effect will be presented, with respect to the design, fabrication, and preliminary characterization. The targeted application region for these sensors is low-frequency detection of submarine sound Both the acoustic-electric transducer infrastructure and the acoustic package of hydrophone have been optimized, which has great effect on the performance of the novel MEMS vector hydrophone. The sound signal can be detected.[10]

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