Abstract
Measurements of the sticking coefficients for rubidium, barium, and bismuth have been made during molecular beam epitaxy of (Rb,Ba)BiO3 on MgO. This simple cubic perovskite is a high temperature superconductor for Rb fractions between 0.4 and 0.5. The dependence of the sticking coefficients on substrate temperature, oxygen plasma conditions, and on incident flux composition indicate that in a narrow region of flux compositions, adsorption, and desorption rates of bismuth and rubidium will control the stoichiometry of the film.
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More From: Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
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