Abstract
AbstractThe adsorption and reaction of titanium tetrachloride (TiC14) on W(100) was investigated using temperature programmed desorption mass spectrometry (TPRS), x-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES), and low energy electron diffraction (LEED). TiC14 adsorbs molecularly on W(100) at 100 K. Desorption from the molecularly bound state occurs near 220 K. Competing with desorption is dissociation to adsorbed TiCl3, which reacts to form gaseous TiCl4 near 450 K. TiC13 also decomposes into atomically adsorbed Ti and Cl on the surface upon heating to 700 K.
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