Abstract

This paper presents a droplet-based method for detecting the mass of fluid-based microparticles. The degree of wettability on silicon-based substrates is therefore investigated for enhanced adsorption of microparticles. Contact angles of 47.3° (pre-treatment) and below 9° (enhanced hydrophilicity upon oxygen plasma treatment) have been realized. Segments of mono-layered particles on the substrate and the possibility of homogenous distribution are also demonstrated. The volume and the surface-contact area of droplets on the substrate have been determined, hence empowering an envisaged optimized design of a particle-well cantilever. The determination of the mass of adsorbed microparticles on the cantilever has also been investigated.

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