Abstract
The adsorption and decomposition of acetylene on Si(100)-(2×1) have been studied in ultrahigh vacuum by Auger electron spectroscopy, temperature-programmed desorption, and changes in the partial pressure of acetylene as measured by a quadrupole mass spectrometer during the formation of a monolayer. Acetylene was found to chemisorb onto Si(100)-(2×1) via a mobile precursor. The difference between the activation energy for desorption from the precursor and that for reaction from the precursor into the chemisorbed state was found to be (E d -E r )=1.9±0.6 kcal mol -1
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