Abstract

Microcantilever resonant frequency and mass fluctuation caused by adsorption and desorption of surrounding particles in a two-gas atmosphere are considered. Detailed derivations of mass fluctuation power spectral density and frequency fluctuation power spectral density are performed using analytical approach. The analogy between Shockley-Read generation-recombination processes of electrons in solids and adsorption-desorption processes of particles of a two gas atmosphere around the cantilever is shown. Simulation is given for a silicon microcantilever surrounded by nitrogen and hydrogen.

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