Abstract
This paper presents a simple but effective process to fabricate high quality aspheric microlens arrays (MLA) and bifocal microlens arrays (BMLA) by predicting and adjusting the UV light distribution. The profile-controllable BMLA has two different focal lengths simultaneous along the optical axis, measured at f1 = 26 ± 1 μm (the top lens) and f2 = 35 ± 1 μm (the base lens), respectively. The fill-factor and curvature of the obtained profiles have been well optimized by controlling the air gap and exposure time, for instance, the fill factor is topped up to 99.7% from an initial 25.8% (the corresponding aperture diameter is enlarged to 15 μm from an initial 10 μm) and the micro lens height ranges from 2.66 μm to 9.03 μm. Optical tests indicate that MLAs and BMLAs have a uniform shape and a good consistency of the focal length. By adjusting the light distribution, this proposed strategy possesses the ability and flexibility to fabricate profile-controllable MLAs and BMLAs.
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