Abstract

Detuning errors limit the accuracy of phase extraction in phase-shifting interferometry (PSI). To improve this accuracy, the systems to control the phase shifter dispositive must be highly accurate, involving high technology, exhaustive calibration, high cost, and constant maintenance. This manuscript presents a method for improving the accuracy of the phase step generated at the Fourier plane by rotating and displacing the grating in a double-aperture common-path interferometer. It is demonstrated that both the detuning errors and the phase extraction uncertainty decrease with the grating rotation angle. The experimental implementation is very simple, as it does not require any sophisticated mechanical system to improve the accuracy, no exhaustive calibration, and no additional mechanical and optical dispositive. With the present approach, the PSI method could be achieved very simply and with high accuracy by using a low-accuracy actuator. The theoretical model and experimental results are presented to demonstrate the present proposal.

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