Adhesion Strength and Interface Chemistry with Cr, 50%Cr-50%Ni or Ni Buffer Layer in Cu/buffer Layer/polyimide System

Abstract

In the microelectronics packaging industry, the adhesion strength between Cu and polyimide and the thermal stability are very important factors, as they influence the performance and reliability of the device. The three different buffer layers of Cr, 50%Cr-50%Ni, and Ni were adopted in a Cu/buffer layer/polyimide system and compared in terms of their adhesion strength and thermal stability at a temperature of <TEX>$300^{\circ}C$</TEX> for 24hrs. A 90-degree peel test and XPS analysis revealed that both the peel strength and thermal stability decreased in the order of the Cr, 50%Cr-50%Ni and Ni buffer layer. The XPS analysis revealed that Cu can diffuse through the thin Ni buffer layer (<TEX>$200{\AA}$</TEX>), resulting in a decrease in the adhesion strength when the Cu/buffer layer/polyimide multilayer is heat-treated at a temperature of <TEX>$300^{\circ}C$</TEX> for 24hrs. In contrast, Cu did not diffuse through the Cr buffer layer under the same heat-treatment conditions.