Abstract

A comprehensive empirical study of chromium-glass adhesion is described. The experimental matrix includes variations in cleaning procedures, substrates, and vacuum treatments. Particular attention is given to glow discharge ambients, including active and noble gases. The effect of substrate heating was also investigated. The dynamic peel adhesion test was used for comparison of adhesion strengths, and this technique is described. The study was directed toward finding a process compatible with high-throughput production techniques. Quantitative data are given that compare various deposition regimes, and results show a significantly improved chromium deposition process for this particular class of substrates. Some general comments are made regarding the adhesion mechanism and other related phenomena.

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