Abstract
Abstract Adherent diamond coating on sintered silicon nitride substrate was prepared by a microwave plasma enhanced chemical vapor deposition (CVD) in the CO and H 2 reactant system. The substrate was pretreated in a hot and strong acid solution and microflawed ultrasonically with diamond grains suspended in ethanol. The effects of diamond-like carbon (DLC) interlayer on the adhesion strength of diamond film was investigated in relation to the formation of the graded texture and characteristic C–C bonding varied from substrate side to diamond film. The DLC interlayer was grown by RF plasma enhanced CVD in the CH 4 –H 2 system. Adhesion strength of the diamond film were evaluated by a compression topple test and the subsequent observation of the fractured surface. Adhesion was found to increase considerably by the insertion of DLC layer, which would relax the residual stress in the interfacial region between diamond film and substrate. Actual cutting test by milling the Al–20 wt%Si alloy work revealed an excellent long tool life in using a thick diamond coated specimen inserted with DLC interlayer.
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