Abstract
Ion beam mixing and pull-off tests have been performed to improve the adhesion in metal/ceramic systems. Adhesion was examined for layers which were deposited in different ways by several PVD methods. Specimens of polycrystalline Al 2O 3 and single crystals (sapphire) with c-axis alignment were used as substrates. Ion bombardment was carried out using 100–400 keV N 2 + ions with fluences ranging from 1 × 10 17 to 1 × 10 18 N +/cm 2. X-ray photoelectron spectroscopy (XPS) studies were made to examine the relationship between the adhesion and the chemical states of elements in the ion-mixed interfacial layers. The results of these studies are discussed in the paper.
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