Adhesion and frictional force measurements employing scanning probe microscopy in a pentafluoropropane gas atmosphere

Abstract

Ultraviolet (UV) nanoimprinting is a useful technique to fabricate nanostructure devices with high throughput, high resolution, and low cost. To eliminate bubble defects, one of the main problems in UV nanoimprinting, UV nanoimprinting in an atmosphere of pentafluoropropane (PFP) gas, which is a condensable gas, is proposed. This process has been reported to reduce the demolding force. To examine the PFP gas effect in a nanometer-scale area, adhesion and frictional forces were measured by scanning probe microscopy in a PFP gas atmosphere. The results show that the adhesion and frictional forces measured by scanning probe microscopy in a PFP gas atmosphere were lower than those measured in air and a N2 gas atmosphere. Furthermore, the adhesion and frictional forces were found to depend on the PFP gas pressure.