Abstract
Abstract Various smooth hydrophobic silane coatings were prepared on a Si substrate using CVD. Then adhesion and friction force for these coatings were evaluated using force curve measurements and friction force microscopy with Si3N4-coated Si cantilevers in the ambient atmosphere. The adhesion force depended on the cosine of the water contact angle, which suggests that it was governed by the capillary force. The water contact angle, packing density, rigidity, and molecular interaction contribute to the friction coefficient of the coatings.
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