Abstract
AbstractThe Mg doping for MOVPE InN has been studied using biscyclopentadienyllmagnesium CP2Mg as a Mg source. The InN samples grown near the upstream end of the 18 cm long susceptor have very small grain size and contain a high level of C and H contamination. The XPS analysis of the deposits obtained by the supply of CP2Mg together with NH3 reveals that new Mg compounds are formed near the upstream end of the susceptor. The new compounds are adducts of CP2Mg and NH3, because they can not be formed when only CP2Mg is supplied. The adduct formation seems to be a cause for the very small grain size and the high levels of C and H contamination. The adduct formation is suppressed at positions with a distance more than 9 cm from the upstream end. This means that designs of reactor and susceptor are very important for successful Mg doping of InN with CP2Mg. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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