Abstract
It is well-known that charge exchange events and dissociation of molecular ions after extraction and prior to mass analysis result in changes to a so-called apparent mass of the ion and increase the possibility of energetic contamination in ion implantation. It was found that if charge exchange events and dissociation of molecular ions already take place during extraction, additional peaks occur in a mass spectrum. They were observed for all of the used source feed materials, such as AsH3, BF3, and argon. In this paper, the origin of these peaks is discussed and a model that calculates the apparent mass as a function of the extraction voltage is presented.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
