Abstract
Abstract The utilization of a bendable, variable-radius mirror as a key optical element to control resolution (and throughput) of an XUV monochromator is discussed. A bendable mirror is placed between source and grating; by bending it to either a concave or a convex figure along the dispersion direction, a variation of monochromator resolution is accomplished. As an application example, a plane-grating soft X-ray monochromator equipped with this bendable mirror system was investigated with ray-tracing calculations.
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