Adaptive Online Time-Series Prediction for Virtual Metrology in Semiconductor Manufacturing

Abstract

This paper proposes a novel highly accurate virtual metrology (VM) method based on adaptive online time-series learning. The method comprises a novel time-series prediction algorithm robust against data drifts and shifts observed in semi-conductor manufacturing. The prediction algorithm incorporates time-aware data normalization and adaptive online learning. The time-aware normalizer transforms the data to suppress the effect of drifts. The adaptive online learner captures the time-varying relationship between response and inputs caused by shifts. On both simulated and real process data our approach outperforms conventional VM approaches. When applied to advanced process control (APC) on high-volume production lines at a major semiconductor manufacturer, our VM method substantially reduced variability of process outcomes.