Abstract
In this study, the neuro fuzzy logic selection of the most influential parameters for non-uniformity of polished surface was performed. The influence of three parameters was analyzed: carrier load, thickness and the pads elastic modulus. Adaptive neuro fuzzy logic or ANFIS was used for establishing the nonlinear relationships between the three parameters and the non-uniformity polished surface. Dataset for training and testing procedure was extracted by finite element model. According to the regression models, thickness of pad has the greatest influence on the non-uniformity. Moreover, elastic modulus and pad thickness are the optimal combination of non-uniformity. Results could be useful in the improvement of chemical polishing process.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of the Institute of Electronics and Computer
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
